Thermodynamics and growth kinetical consideration of metal-nitride formation by nitrogen implantation
- 16 May 1989
- journal article
- review article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 113 (1) , 11-22
- https://doi.org/10.1002/pssa.2211130102
Abstract
No abstract availableKeywords
This publication has 34 references indexed in Scilit:
- Formation of silver trinitride by nitrogen implantationJournal of Physics C: Solid State Physics, 1988
- Structural transformation induced by nitrogen implantation in thin metal filmsThin Solid Films, 1987
- Formation of Metal Nitrides by Nitrogen ImplantationMRS Proceedings, 1985
- Ion Implantation in MetalsAnnual Review of Materials Science, 1984
- Implantation phases in solidsNuclear Instruments and Methods in Physics Research, 1983
- Ion bombardment of group IV elemental metal and synthetic nitride filmsThin Solid Films, 1979
- Chemical reactions of N2+ ion beams with first-row transition metalsThe Journal of Physical Chemistry, 1979
- Formation of chemical compounds by ion bombardment of thin transition metal filmsPhysica Status Solidi (a), 1978
- Phase transformations at bombardment of thin films with ionsPhysica Status Solidi (a), 1975
- Oxide der Tieftemperaturoxydation von Niob und TantalJournal of the Less Common Metals, 1962