Hydrogen adsorption on GaAs(110) studied by temperature-programmed desorption

Abstract
GaAs(110) was cleaved in ultrahigh vacuum and exposed to atomic and to molecular hydrogen. After exposure at 250 K to molecular hydrogen neither H nor H2 is found desorbing up to 670 K. Upon adsorption of atomic hydrogen, use of the temperature-programmed-desorption technique reveals a second-order process for the desorption of molecular hydrogen (Ed=13.8 kcal/mole, Tmax near 450 K), with no desorption of atomic hydrogen. Desorption of AsH3 (Tmax=340 K) precedes the desorption of H2. Further H chemisorption induces an additional amount of Ga atoms to desorb above 700 K. Preadsorption of hydrogen decreases the As2 evaporation rate. An energy scheme with the equilibrium and an excited adsorbate state is derived from the combination of the temperature-programmed-desorption data and the high-resolution electron-energy-loss spectroscopy data of Lüth and Math [Phys. Rev. Lett. 46, 1652 (1981)].