Detectability limits for boron and phosphorus in silicon by Auger electron spectroscopy (AES)
- 1 February 1974
- journal article
- other
- Published by Elsevier in Surface Science
- Vol. 41 (2) , 629-633
- https://doi.org/10.1016/0039-6028(74)90083-1
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A LEED and AES study of the Ph3 adsorption on clean Si(111)Surface Science, 1973
- In-depth profiles of phosphorus ion-implanted silicon by Auger spectroscopy and secondary ion emissionSurface Science, 1972
- Resistivity of Bulk Silicon and of Diffused Layers in SiliconBell System Technical Journal, 1962