Generalized phase-shifting interferometry
- 1 May 1991
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America A
- Vol. 8 (5) , 822-827
- https://doi.org/10.1364/josaa.8.000822
Abstract
We describe a generalized phase-shifting interferometry for which the reference phases are directly evaluated at each time that the interference fringe data are read. The reference phases are obtained from the additional straight fringes on the interfering plane by the fast-Fourier-transform method. According to error estimation, the repeatabilities in the measurements of optical surfaces are λ/500 rms, when the generalized algorithm with eight data acquisitions is used.Keywords
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