XPS study of TiOx thin films prepared by d.c. magnetron sputtering in Ar-O2 gas mixtures
- 1 August 2000
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 30 (1) , 527-530
- https://doi.org/10.1002/1096-9918(200008)30:1<527::aid-sia834>3.0.co;2-z
Abstract
No abstract availableKeywords
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