Y-Ba-Cu-O Thin Film on Si Substrate
- 1 August 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (8A) , L1524-1526
- https://doi.org/10.1143/jjap.27.l1524
Abstract
Superconducting Y-Ba-Cu-O thin films have been prepared by RF magnetron sputtering on Si(100) substrate with a buffer layer of ZrO2 or MgO. The film with a ZrO2 buffer layer exhibited a superconductive transition with zero resistance at 82 K. X-ray diffraction patterns indicated a preferential orientation where c-axes were perpendicular to the substrate.Keywords
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