Growth and morphology of Er-doped GaN on sapphire and hydride vapor phase epitaxy substrates
- 1 May 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 17 (3) , 1195-1199
- https://doi.org/10.1116/1.590722
Abstract
We report the morphological and compositional characteristics and their effect on optical properties of Er-doped GaN grown by solid source molecular beam epitaxy on sapphire and hydride vapor phase epitaxy GaN substrates. The GaN was grown by molecular beam epitaxy on sapphire substrates using solid sources (for Ga, Al, and Er) and a plasma gas source for N2. The emission spectrum of the GaN:Er films consists of two unique narrow green lines at 537 and 558 nm along with typical Er3+ emission in the infrared at 1.5 μm. The narrow lines have been identified as Er3+ transitions from the H11/22 and S3/24 levels to the I15/24 ground state. The morphology of the GaN:Er films showed that the growth resulted in either a columnar or more compact structure with no effect on green light emission intensity.Keywords
This publication has 25 references indexed in Scilit:
- Trap-mediated excitation of Er3+ photoluminescence in Er-implanted GaNApplied Physics Letters, 1997
- Photoluminescence spectroscopy of erbium implanted gallium nitrideApplied Physics Letters, 1997
- Observation of multiple Er3+ sites in Er-implanted GaN by site-selective photoluminescence excitation spectroscopyApplied Physics Letters, 1997
- Direct and indirect excitation of Er3+ ions in Er: AINApplied Physics Letters, 1997
- Site-Selective Photoluminescence Excitation and Photoluminescence Spectroscopy of Er-Implanted Wurtzite GaNMRS Proceedings, 1997
- Electroluminescence from erbium and oxygen coimplanted GaNApplied Physics Letters, 1996
- Er doping of AlN during growth by metalorganic molecular beam epitaxyApplied Physics Letters, 1996
- Luminescence properties of erbium in III–V compound semiconductorsSolid-State Electronics, 1995
- Intense erbium-1.54-μm photoluminescence from 2 to 525 K in ion-implanted 4H, 6H, 15R, and 3C SiCApplied Physics Letters, 1994
- Thermal quenching of Er3+-related luminescence in In1−xGaxPApplied Physics Letters, 1992