Off-axis sputter deposition of YBa2Cu3O7 thin films for microwave applications
- 23 September 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (13) , 1629-1631
- https://doi.org/10.1063/1.106252
Abstract
Thin films of superconducting YBa2Cu3O7 were grown in situ by off‐axis sputter deposition for microwave device fabrication. These ∼1 cm2 films, which are reproducible, exhibit midpoint Tc’s of 89–90.5 K as measured by ac susceptibility, ion channeling yields of 4.7%–6%, and c‐axis rocking‐curve half‐widths of 0.5°, even with a rich microstructure as seen by scanning electron microscopy. Two films were photodefined into miniature X‐band microwave bandpass filters. These narrow‐band filters (0.5% bandwidth) exhibited 4.4‐and 4.5‐dB insertion losses at 77 K and 9.25 GHz, with little temperature dependence below 80 K.Keywords
This publication has 6 references indexed in Scilit:
- Surface outgrowth problem in c-axis oriented Y-Ba-Cu-O superconducting thin filmsApplied Physics Letters, 1991
- Performance of a narrow band microwave filter implemented in thin-film YBa2Cu3O7−δ with ohmic contactsApplied Physics Letters, 1991
- YBa2Cu3O7−δ superconducting films with low microwave surface resistance over large areasApplied Physics Letters, 1990
- I n s i t u grown YBa2Cu3O7−d thin films from single-target magnetron sputteringApplied Physics Letters, 1989
- Millimeter wave surface resistance of epitaxially grown YBa2Cu3O7−x thin filmsApplied Physics Letters, 1989
- Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk materialApplied Physics Letters, 1987