Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition
- 1 November 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (6) , 3190-3198
- https://doi.org/10.1116/1.581519
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Plasmas and polymers: From laboratory to large scale commercializationPublished by Walter de Gruyter GmbH ,1996
- Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substratesSurface and Coatings Technology, 1996
- Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical-vapor depositionJournal of Vacuum Science & Technology A, 1994
- Commercial-scale application of plasma processing for polymeric substrates: From laboratory to productionJournal of Vacuum Science & Technology A, 1992
- Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Dual microwave-r.f. plasma deposition of functional coatingsThin Solid Films, 1990
- Results of apparent atomic oxygen reactions with spacecraft materials during Shuttle flight STS-41GJournal of Spacecraft and Rockets, 1988
- Large-area microwave plasma etching of polyimideJournal of Physics D: Applied Physics, 1987
- Structure and oxygen-barrier properties of metallized polymer filmJournal of Materials Science, 1983
- Theory of Permeation through Metal Coated Polymer FilmsThe Journal of Physical Chemistry, 1959