RBS analysis of beam-processed microarea by focused MeV ion beam
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4) , 40-42
- https://doi.org/10.1016/0168-583x(89)90738-6
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Developments on the Melbourne scanning proton microprobePublished by Elsevier ,2002
- Microbeam line with 1.5 MeV helium ions and protons at OsakaNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Microanalysis by Focused MeV Helium Ion BeamJapanese Journal of Applied Physics, 1987
- 200 kV Mass-Separated Fine Focused Ion Beam ApparatusJapanese Journal of Applied Physics, 1985
- Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion BeamsJapanese Journal of Applied Physics, 1984
- High energy ion microprobesNuclear Instruments and Methods in Physics Research, 1983
- A review of laser–microchemical processingJournal of Vacuum Science & Technology B, 1983