Micromechanical optical switching with voltage control using SOI movable integrated optical waveguides
- 1 November 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (11) , 1297-1299
- https://doi.org/10.1109/68.473477
Abstract
Optical switching is demonstrated using movable integrated optical waveguides fabricated on silicon-on-insulator substrates. The switching effect is produced by the voltage-controlled micromechanical deflection of the movable waveguides. The dynamic response of the deflection is studied. A contrast ratio of 12 dB of switching is obtained using an applied voltage of less than 10 V. At 20 V, the contrast ratio is about 40 dB.Keywords
This publication has 9 references indexed in Scilit:
- Surface-micromachined Movable SOI Optical WaveguidesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Electromechanical optical switching and modulation in micromachined silicon-on-insulator waveguidesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fibre-optic 1 × 6 switch with smooth transmission spectrumSensors and Actuators A: Physical, 1994
- Micromachines on the marchIEEE Spectrum, 1994
- Non-Blocking 100 × 100 Optomechanical Matrix SwitchJournal of Optical Communications, 1993
- Optomechanical M x N fiber-optic matrix switchPublished by SPIE-Intl Soc Optical Eng ,1991
- Low loss singlemode optical waveguides with large cross-section in silicon-on-insulatorElectronics Letters, 1991
- Electrostatically driven fiber-optic micromechanical on/off switch and its application to subscriber transmission systemsJournal of Lightwave Technology, 1990
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978