Crystal Orientation of YBa2Cu3O7-y Thin Films Prepared by RF Sputtering

Abstract
The effect of growth temperature on the crystallinity and morphology of YBa2Cu3O7-y thin films was investigated. Thin films were grown on MgO (100) single-crystal substrates by RF magnetron sputtering. Preferred orientations of thin films can be controlled by adjusting the substrate temperature, T s; (100) a-axis oriented films were deposited at 540°C<T sT sc-axis oriented films were deposited above 610°C.