Crystal Orientation of YBa2Cu3O7-y Thin Films Prepared by RF Sputtering
- 1 December 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (12A) , L2199
- https://doi.org/10.1143/jjap.29.l2199
Abstract
The effect of growth temperature on the crystallinity and morphology of YBa2Cu3O7-y thin films was investigated. Thin films were grown on MgO (100) single-crystal substrates by RF magnetron sputtering. Preferred orientations of thin films can be controlled by adjusting the substrate temperature, T s; (100) a-axis oriented films were deposited at 540°C<T sT sc-axis oriented films were deposited above 610°C.Keywords
This publication has 9 references indexed in Scilit:
- Sputter Deposition of YBa2Cu3O7-x Thin Films with Low Gas PressureJapanese Journal of Applied Physics, 1990
- Epitaxial Y-Ba-Cu-O thin films on MgO deposited by high-pressure reactive magnetron sputteringJournal of Applied Physics, 1989
- Effect of Substrate Temperature and Composition on the Crystalline State of Ba2YCu3O7-δ Magnetron-Sputtered Thin FilmsJapanese Journal of Applied Physics, 1989
- Epitaxy and Orientation of Eu1Ba2Cu3O7-y Films Grown In Situ by Magnetron SputteringJapanese Journal of Applied Physics, 1989
- Effects of Oxygen Partial Pressure and Substrate Temperature on Crystalline Orientation in Y-Ba-Cu-O Films Prepared by SputteringJapanese Journal of Applied Physics, 1989
- Magnetoresistance and thermodynamic fluctuations in single-crystalPhysical Review B, 1989
- Crystallinity and Morphology of Superconducting Thin Films Prepared by SputteringJapanese Journal of Applied Physics, 1989
- Anisotropic characteristic lengths in single crystal YBa2Cu3O7−δPhysica C: Superconductivity and its Applications, 1988
- Anisotropic nature of high-temperature superconductivity in single-crystalPhysical Review Letters, 1987