High confinement micron-scale silicon nitride high Q ring resonator
Top Cited Papers
- 23 June 2009
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 17 (14) , 11366-11370
- https://doi.org/10.1364/oe.17.011366
Abstract
We demonstrate high confinement, low-loss silicon nitride ring resonators with intrinsic quality factor (Q) of 3∗106 operating in the telecommunication C-band. We measure the scattering and absorption losses to be below 0.065dB/cm and 0.055dB/cm, respectively.Keywords
This publication has 13 references indexed in Scilit:
- Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguidesApplied Physics Letters, 2008
- Vertical multiple-slot waveguide ring resonators in silicon nitrideOptics Express, 2008
- Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical propertiesOptics Express, 2008
- Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguidesOptics Express, 2008
- Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguidesOptics Express, 2007
- Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platformOptics Express, 2007
- Optical manipulation of microparticles and cells on silicon nitride waveguidesOptics Express, 2005
- Fabrication techniques for low-loss silicon nitride waveguidesPublished by SPIE-Intl Soc Optical Eng ,2005
- Fabrication and optical characterization of thin two-dimensional Si3N4 waveguidesMaterials Science in Semiconductor Processing, 2004
- Amorphous silicon nitride microcavitiesJournal of the Optical Society of America B, 2001