Fabrication and optical characterization of thin two-dimensional Si3N4 waveguides
- 31 December 2004
- journal article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 7 (4-6) , 453-458
- https://doi.org/10.1016/j.mssp.2004.09.023
Abstract
No abstract availableKeywords
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