Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties

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Abstract
This paper presents work aimed at optimizing the fabrication of silicon nitride SixNy thin-film visible-light planar waveguides using plasma-enhanced chemical vapour deposition (PECVD). The effects of plasma frequency, precursor gas ratio, and thermal annealing in relation to waveguide optical properties (refractive index, propagation losses) are studied. Experimental results over a wide range of precursor gas ratios show convincingly that waveguides fabricated using low-frequency PECVD have lower propagation losses in the visible range compared to waveguides of equal refractive index fabricated with high-frequency PECVD.