Passivation effects on the stability of pentacene thin-film transistors with SnO2 prepared by ion-beam-assisted deposition
- 31 October 2005
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 23 (6) , 2357-2362
- https://doi.org/10.1116/1.2102969
Abstract
The long-term stability of pentacene thin-film transistors (TFTs) encapsulated with a transparent thin-film prepared by ion-beam-assisted deposition (IBAD) was investigated. When a buffer layer of 100-nm film had been thermally deposited to reduce ion-induced damage prior to the IBAD process, our encapsulated organic thin-film transistors (OTFTs) showed somewhat degraded field-effect mobility of that was initially , while the OTFTs without a buffer layer showed a 60% reduction in field-effect mobility after the IBAD process. However, surprisingly, the mobility was sustained up to one month and then gradually degraded down to , which was still three times higher than that of the OTFT without any encapsulation layer after 100 days in air. The encapsulated OTFTs also exhibited superior on/off current ratio of over to that of the unprotected devices , which was reduced from before aging. Therefore, the enhanced long-term stability of our encapsulated OTFTs should be attributed to good protection of permeation against into the devices with the IBAD thin film, which was identified as having a dense amorphous microstructure with lots of OH groups. Passivation effects on the electrical properties of OTFTs are discussed in terms of the physical and chemical properties of the barrier films.
Keywords
This publication has 20 references indexed in Scilit:
- Pentacene-based radio-frequency identification circuitryApplied Physics Letters, 2003
- Low temperature PECVD SiNx films applied in OLED packagingMaterials Science and Engineering: B, 2003
- Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substratesApplied Physics Letters, 2002
- Characterisation of aluminium oxynitride gas barrier filmsThin Solid Films, 2001
- Modeling of organic thin film transistors of different designsJournal of Applied Physics, 2000
- Pentacene organic thin-film transistors for circuit and display applicationsIEEE Transactions on Electron Devices, 1999
- Degradation processes at the cathode/organic interface in organic light emitting devices with Mg:Ag cathodesApplied Physics Letters, 1998
- Field-effect transistors made from solution-processed organic semiconductorsSynthetic Metals, 1997
- Logic Gates Made from Polymer Transistors and Their Use in Ring OscillatorsScience, 1995
- All-Polymer Field-Effect Transistor Realized by Printing TechniquesScience, 1994