A characteristic fluorescence correction for electron-probe microanalysis of thin coatings
- 14 September 1979
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 12 (9) , 1441-1451
- https://doi.org/10.1088/0022-3727/12/9/006
Abstract
An equation is developed for calculating the X-ray fluorescence produced in a coating by characteristic X-rays generated in the substrate material. The correction is applied to experimental microanalysis data obtained for thin coatings deposited on a range of substrate materials and is shown to give satisfactory results. An extension of the method to include multicomponent systems is then described.Keywords
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