Impact of SOI Thickness Fluctuation on Threshold Voltage Variation in Ultra-Thin Body SOI MOSFETs
- 16 May 2005
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Nanotechnology
- Vol. 4 (3) , 369-373
- https://doi.org/10.1109/tnano.2005.846913
Abstract
Threshold voltage variation due to quantum confinement effect in ultra-thin body silicon-on-insulator (SOI) MOSFETs is examined. It is experimentally demonstrated that threshold voltage variation drastically increases when SOI layer is thinned down to 3 nm. A percolation model is used to estimate the contribution of surface roughness to V/sub th/ variation. The method to suppress the threshold voltage variation is also proposed, and around 15% reduction in threshold voltage variation is experimentally demonstrated by applying substrate bias. The reason of the suppression can be explained by quantum confinement effect induced by substrate bias.Keywords
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