Measurements of Internal Parameters of a Microplasma
- 1 May 1966
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 5 (5)
- https://doi.org/10.1143/jjap.5.369
Abstract
A Method of describing a microplasma by its equivalent internal parameters is reported. The switch-on voltage, switch-off voltage, plasma resistance r, parallel capacity C and internal series resistance R s are chosen as the basic parameters. These parameters are estimated from experimental results. The change of rising waveform of a microplasma pulse is explained by the parallel breakdown of more than two microplasmas.Keywords
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