Slip Free Rapid Thermal Processing
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Thermoplastic Deformation of Silicon WafersJournal of the Electrochemical Society, 1986
- Investigation of transient diffusion effects in rapid thermally processed ion implanted arsenic in siliconApplied Physics Letters, 1985
- Warpage of Silicon WafersJournal of the Electrochemical Society, 1980
- X-ray characterization of stresses and defects in thin films and substratesThin Solid Films, 1976