A microbeam line for medium-energy ion beams
- 1 January 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 45 (1-4) , 553-556
- https://doi.org/10.1016/0168-583x(90)90898-5
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Magnetic Analysis of Quadrupole Lens for MeV Ion MicroprobeJapanese Journal of Applied Physics, 1989
- Microbeamline design for medium to high energy helium ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Laser-induced thermochemical maskless-etching of III?V compound semiconductors in chloride gas atmosphereApplied Physics A, 1988
- Microbeam line with 1.5 MeV helium ions and protons at OsakaNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Activities for the construction of a new heidelberg proton MicroprobeNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Focused MeV beam line for microanalysis at OsakaNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Microanalysis by Focused MeV Helium Ion BeamJapanese Journal of Applied Physics, 1987
- Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion BeamsJapanese Journal of Applied Physics, 1984