Macrovacancy nucleation on evaporating Si(001)
- 30 May 1994
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 72 (22) , 3566-3569
- https://doi.org/10.1103/physrevlett.72.3566
Abstract
Measurements of the nucleation rate of macrovacancies (‘‘Lochkeim’’ formation) on Si(001) during high-temperature sublimation are presented. A theoretical description of macrovacancy nucleation on evaporating surfaces is also given. The nucleation rate is shown to follow a non-Arrhenius behavior as a function of temperature. The experiment is seen to compare favorably with the theory.Keywords
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