Experimental study of the growth evolution from random towards a (111) preferential orientation of PVD TiN coatings

This publication has 15 references indexed in Scilit:

• Microstructure modification of TiN by ion bombardment during reactive sputter deposition
  Published by Elsevier ,2002
• Recent progress in the study of physically vapour-deposited coatings produced by means of highly ionized plasmas
  Surface and Coatings Technology, 1992
• Texture analysis of martensitic hot-worked tool steel H13 coated with TiN by physical vapour deposition
  Materials Science and Engineering: A, 1991
• Unbalanced magnetrons and new sputtering systems with enhanced plasma ionization
  Journal of Vacuum Science & Technology A, 1991
• Reactive sputtering of TiN films at large substrate to target distances
  Vacuum, 1990
• ε-Ti2N phase growth control in titanium nitride films
  Thin Solid Films, 1989
• Properties of ion-plated TiN coatings grown at low temperatures
  Surface and Coatings Technology, 1988
• Dependence of microstructure of TiN coatings on their thickness
  Thin Solid Films, 1988
• Morphology and structure of ion-plated TiN, TiC and Ti(C, N) coatings
  Thin Solid Films, 1984
• TiN and TiC coating on cemented carbides by ion plating
  Thin Solid Films, 1978