The structure of ultrathin C/W and Si/W multilayers for high performance in soft x-ray optics
- 15 May 1989
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 65 (10) , 3907-3913
- https://doi.org/10.1063/1.343354
Abstract
Ultrathin layers are now playing an important role in the field of soft x-ray optics. Their performances depend critically on their structure (thickness, interface, crystalline state, etc.). We have used electron microscopy to determine this kind of information. The usual methods of sample preparation have been optimized in order to limit irradiation damage for these highly nonhomogeneous materials. We have introduced the technique of cleavage which allows for the examination of the as-fabricated structures. We were then able to determine that the deposition technique used can produce amorphous W layers up to thicknesses of 40 Å.This publication has 11 references indexed in Scilit:
- Microcleavage transmission electron microscopy applied to the interfacial structure of multilayers and microstructure of small particles on a substrateApplied Physics Letters, 1987
- High-resolution electron microscopy study of x-ray multilayer structuresJournal of Applied Physics, 1987
- Amorphous Ti-Si alloy formed by interdiffusion of amorphous Si and crystalline Ti multilayersJournal of Applied Physics, 1987
- Performance Of Sputter Deposited Multi Layer X-Ray MirrorsPublished by SPIE-Intl Soc Optical Eng ,1986
- High resolution electron microscopy of the GaAs/Si3N4 interface produced by multipolar plasma depositionApplied Physics Letters, 1986
- Performances Of C-W Multilayers As Soft X-Rays Optics : High Reflectivity In The Range 2d = 60 to 100 ÅPublished by SPIE-Intl Soc Optical Eng ,1986
- TEM methods for the characterization of fine metal multilayersUltramicroscopy, 1985
- Space qualification of multilayered opticsPublished by SPIE-Intl Soc Optical Eng ,1985
- MULTILAYER X-RAY MIRRORS, A FIRST STEP TOWARDS THE CUSTOM DESIGN OF NEW MATERIAL PROPERTIESMRS Proceedings, 1985
- Characterization of layered synthetic microstructure by transmission electron microscopy and diffractionOptics Letters, 1984