Miniature high current metal ion source
- 20 October 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 49 (16) , 1019-1021
- https://doi.org/10.1063/1.97458
Abstract
A small, simple ion source for the production of high brightness beams of metal ions is described. A metal vapor vacuum arc discharge is used to establish the high density plasma from which the ion beam is extracted. The source is finger sized, and can produce pulsed metal ion beams with current up to the 10-mA range.Keywords
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