The Rossendorf 3 MV tandetron: a new generation of high-energy implanters
- 1 November 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 382 (1-2) , 357-360
- https://doi.org/10.1016/s0168-9002(96)00393-2
Abstract
No abstract availableKeywords
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