Near-field optical microscope using a silicon-nitride probe
- 1 February 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (5) , 461-463
- https://doi.org/10.1063/1.108933
Abstract
Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon- nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging on arbitrary surfaces without tip destruction. The effect of adhesion forces on the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific sample area can be selected using an integrated conventional light microscopeKeywords
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