Direct-etching studies of polymer films using a 157-nm F_2 laser
- 1 May 1986
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America B
- Vol. 3 (5) , 792-795
- https://doi.org/10.1364/josab.3.000792
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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