Optically Powered Silicon Microresonator Pressure Sensor
- 1 January 1989
- book chapter
- Published by Springer Nature in Springer Proceedings in Physics
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Transient excitation of silicon microresonatorElectronics Letters, 1989
- Self-excited vibrations of optical microresonatorsElectronics Letters, 1988
- Photoacoustic Oscillator SensorsPublished by SPIE-Intl Soc Optical Eng ,1987
- Optical activation of a silicon vibrating sensorElectronics Letters, 1986
- Optically activated vibrations in a micromachined silica structureElectronics Letters, 1985
- Silicon as a mechanical materialProceedings of the IEEE, 1982