Laser processing of silicon
- 1 June 1983
- journal article
- review article
- Published by Springer Nature in Nature
- Vol. 303 (5917) , 481-486
- https://doi.org/10.1038/303481a0
Abstract
No abstract availableKeywords
This publication has 101 references indexed in Scilit:
- Laser processing for high-efficiency Si solar cellsJournal of Applied Physics, 1982
- Ultrashort laser-pulse annealing of hydrogenated amorphous siliconApplied Physics A, 1981
- Silicon solar cells realized by laser induced diffusion of vacuum-deposited dopantsJournal of Applied Physics, 1981
- Nonequilibrium incorporation of impurities during rapid solidificationJournal of Crystal Growth, 1980
- Picosecond laser-induced melting and resolidification morphology on SiApplied Physics Letters, 1979
- Dynamics of Q-switched laser annealingApplied Physics Letters, 1979
- A melting model for pulsing-laser annealing of implanted semiconductorsJournal of Applied Physics, 1979
- Theoretical analysis of thermal and mass transport in ion-implanted laser-annealed siliconApplied Physics Letters, 1978
- Formation of ohmic contacts to III–V semiconductors, using a laser beamSolid-State Electronics, 1974
- Properties of Si diodes prepared by alloying Al into n-type Si with heat pulses from a Nd:YAG laserSolid-State Electronics, 1970