Hollowing and Transfer of Polymethyl Methacrylate Film Propelled by Laser Ablation of Triazeno Polymer Film
- 1 August 2001
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 40 (8A) , L805-806
- https://doi.org/10.1143/jjap.40.l805
Abstract
Utilizing the laser ablation of a triazeno polymer (TA) film as a driving force, materials transfer and patterning were successfully demonstrated. The prepared overlaid films consist of a source film, which is made of pyrene-doped polymethyl methacrylate (PMMA) and TA films, and a target neat PMMA film on a quartz plate. After pressing them together, a 248 nm laser pulse was irradiated from the back side of the source film. When the thickness of the TA film was 1.0 µm, slightly thicker than the penetration depth of TA of 600 nm, the pyrene-doped PMMA film was perfectly transferred to the target film.Keywords
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