Properties and stability of diamond-like carbon films related to bonded and unbonded hydrogen
- 24 April 1993
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 2 (5-7) , 673-677
- https://doi.org/10.1016/0925-9635(93)90202-d
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Structure-property relationships in dual-frequency plasma deposited hard a-C : H filmsSurface and Coatings Technology, 1992
- Deposition and properties of diamondlike carbon films produced in microwave and radio-frequency plasmaJournal of Vacuum Science & Technology A, 1992
- Hard carbon films deposited under high ion fluxThin Solid Films, 1992
- Diamond-like carbon films deposited in a dual microwave-radio-frequency plasmaMaterials Science and Engineering: B, 1992
- Energy fluxes in mixed microwave-r.f. plasmaThin Solid Films, 1990
- Dual microwave-r.f. plasma deposition of functional coatingsThin Solid Films, 1990
- Optical and tribological properties of heat-treated diamond-like carbonJournal of Materials Research, 1990
- Dual-mode microwave/radio frequency plasma deposition of dielectric thin filmsApplied Physics Letters, 1989
- Dense ‘‘diamondlike’’ hydrocarbons as random covalent networksJournal of Vacuum Science & Technology A, 1988