Amorphous thin film diffusion barriers on GaAs and InP
- 1 June 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 104 (1-2) , 57-67
- https://doi.org/10.1016/0040-6090(83)90548-5
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Diffusion and structural relaxation in compositionally modulated amorphous metal filmsApplied Physics Letters, 1980
- Failure Mechanisms and Reliability of Low-Noise GaAs FETsBell System Technical Journal, 1978
- Effect of metalloidal elements on corrosion resistance of amorphous iron-chromium alloysJournal of Non-Crystalline Solids, 1978
- Diffusion in a Pd-Cu-Si metallic glassApplied Physics Letters, 1978
- Studies of aluminum Schottky barrier gate annealing on GaAs FET structuresSolid-State Electronics, 1978
- Performance and reliability of an improved high-temperature GaAs Schottky junction and native-oxide passivationIEEE Transactions on Electron Devices, 1977
- Comparison of electron sources for high-resolution Auger spectroscopy in an SEMJournal of Applied Physics, 1976