Si self-diffusivity using isotopically pure 30Si epitaxial layers
- 15 December 2004
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 114-115, 330-333
- https://doi.org/10.1016/j.mseb.2004.07.055
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
- Foundation for Promotion of Material Science and Technology of Japan
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