High Definition Mesa Growth by Silicon MBE
- 1 January 1991
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Silicon Layers Grown by Differential Molecular Beam EpitaxyJournal of the Electrochemical Society, 1985
- Doping of silicon in molecular beam epitaxy systems by solid phase epitaxyApplied Physics Letters, 1984
- Silicon molecular beam epitaxyThin Solid Films, 1983
- Patterned silicon molecular beam epitaxy with submicron lateral resolutionApplied Physics Letters, 1982
- Signalverarbeitende DiodenPublished by Springer Nature ,1982
- Planar-doped barriers in GaAs by molecular beam epitaxyElectronics Letters, 1980
- Silicon Cleaning with Hydrogen Peroxide Solutions: A High Energy Electron Diffraction and Auger Electron Spectroscopy StudyJournal of the Electrochemical Society, 1972
- Physics of Semiconductor DevicesPhysics Today, 1970