Preparation of Epitaxial Pb(Zr, Ti)O3 Thin Films on Nb-Doped SrTiO3 (100) Substrates by Dipping-Pyrolysis Process
- 1 August 1997
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 36 (8R)
- https://doi.org/10.1143/jjap.36.5221
Abstract
Epitaxially grown Pb(Zr, Ti)O3 (PZT, Pb:Zr:Ti=1:0.52:0.48) thin films were prepared on Nb-doped SrTiO3 (100) substrates by dipping-pyrolysis process with metal naphthenates used as starting materials. The alignments of the films were investigated based on X-ray diffraction (XRD) θ–2θ scans, β scans (pole figures), and asymmetric ω–2θ scans (reciprocal-space maps). Epitaxial films with smooth surfaces were obtained by heat treatment of prefired films at 600°–750° C; a film heat-treated at 750° C showed the strongest peak intensities in the XRD θ–2θ scans. These PZT films were found by reciprocal-space map analysis to consist of the c-axis-oriented tetragonal phase.Keywords
This publication has 12 references indexed in Scilit:
- Preparation of Epitaxial BaTiO3 Thin Films by the Dipping-pyrolysis ProcessJournal of Materials Research, 1997
- Nucleation‐ or Growth‐Controlled Orientation Development in Chemically Derived Ferroelectric Lead Zirconate Titanate (Pb(ZrxTi1−x)O3, x= 0.4) Thin FilmsJournal of the American Ceramic Society, 1996
- Formation and Electrical Properties of Ferroelectric Pb(Zr, Ti)O3 Thin Films by Spin-Coating and Pyrolysis of Metal NaphthenatesJournal of the Ceramic Society of Japan, 1995
- Preparation and Characterization of Sol-Gel Derived Epitaxial and Oriented Pb(Zr0.52Ti0.48)O3 Thin FilmsJapanese Journal of Applied Physics, 1994
- Electric and Pyroelectric Behaviors of PbTiO3 Thin Films Formed by an Excimer Laser Ablation TechniqueJapanese Journal of Applied Physics, 1993
- Grain oriented ferroelectric PZT thin films on lattice-matched substratesMaterials Research Bulletin, 1993
- Epitaxial lead zirconate-titanate thin films on sapphireApplied Physics Letters, 1993
- Highly Oriented, Chemically Prepared Pb(Zr, Ti)O3 Thin FilmsJournal of the American Ceramic Society, 1993
- Guided-wave optical properties of sol-gel ferroelectric filmsJournal of Applied Physics, 1992
- Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric propertiesJournal of Applied Physics, 1989