Resist polymers: Part IX—Thermolysis of chlorine-containing acrylate polymers
- 31 December 1987
- journal article
- Published by Elsevier in Polymer Degradation and Stability
- Vol. 18 (1) , 19-32
- https://doi.org/10.1016/0141-3910(87)90080-2
Abstract
No abstract availableKeywords
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