Fabrication of quasi-zero-dimensional submicron dot array and capacitance spectroscopy in a GaAs/AlGaAs heterostructure
- 2 October 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (14) , 1433-1435
- https://doi.org/10.1063/1.101578
Abstract
A new and very simple technique has been developed for fabricating two-dimensional periodic submicron structures with feature size down to about 300 Å. The etching mask is made by coating the material surface with a monolayer of closely packed uniform latex particles. We have performed capacitance measurements on GaAs/AlGaAs heterostructure samples with a quasi-zero-dimensional dot array of 3300, 3640, and 3940 Å periodicities. A series of nearly equally spaced peaks in a curve of the derivative of capacitance with respect to gate voltage, which corresponds to the energy levels formed by the lateral electric confining potential, is observed.Keywords
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