Shape evolution of oxidized silicon V-grooves during high dose ion implantation
- 31 May 2001
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 178 (1-4) , 109-114
- https://doi.org/10.1016/s0168-583x(00)00469-9
Abstract
No abstract availableKeywords
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