Elastooptical properties of SiON layers in an integrated optical interferometer used as a pressure sensor
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 12 (1) , 163-169
- https://doi.org/10.1109/50.265749
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Sensor application of SiON integrated optical waveguides on siliconSensors and Actuators B: Chemical, 1992
- Integrated optic pressure sensor on silicon substrateApplied Optics, 1989
- Atomistic Theory of Photoelasticity of Cubic CrystalsPublished by Springer Nature ,1981
- The Photoelastic PhenomenonPublished by Springer Nature ,1979