Sensor application of SiON integrated optical waveguides on silicon
- 31 October 1992
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 9 (3) , 209-213
- https://doi.org/10.1016/0925-4005(92)80218-m
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Integrated optic pressure sensor on silicon substrateApplied Optics, 1989
- Integrated Optic Accelerometer Employing a Cantilever on a Silicon SubstrateJapanese Journal of Applied Physics, 1989
- Integrated optic temperature and humidity sensorsJournal of Lightwave Technology, 1986