Spin coating of colloidal suspensions
- 1 April 1992
- journal article
- research article
- Published by Wiley in AIChE Journal
- Vol. 38 (4) , 489-501
- https://doi.org/10.1002/aic.690380403
Abstract
No abstract availableKeywords
This publication has 66 references indexed in Scilit:
- Spin Coating of a PMMA/Chlorobenzene SolutionJournal of the Electrochemical Society, 1991
- Spin coating with slow evaporationPhysics of Fluids A: Fluid Dynamics, 1990
- Solgel derived tantalum pentoxide films as ultraviolet antireflective coatings for siliconApplied Optics, 1989
- The film formation dynamics in spin coatingPhysics of Fluids A: Fluid Dynamics, 1989
- The effects of inertia and interfacial shear on film flow on a rotating diskPhysics of Fluids, 1988
- Hard sphere colloidal dispersions: Viscosity as a function of shear rate and volume fractionThe Journal of Chemical Physics, 1985
- Investigation of the solvent‐evaporation effect on spin coating of thin filmsPolymer Engineering & Science, 1983
- An Investigation of the Thickness Variation of Spun‐on Thin Films Commonly Associated with the Semiconductor IndustryJournal of the Electrochemical Society, 1982
- An investigation of spin coating of electron resistsPolymer Engineering & Science, 1979
- On the flow due to a rotating diskJournal of Fluid Mechanics, 1966