Quantum interferometric optical lithography:towards arbitrary two-dimensional patterns

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  • 21 November 2000
Abstract
As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this procedure in order to create patterns in one and two dimensions. This renders quantum lithography a potentially useful tool in nano-technology.

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