Inert-gas-bubble formation in the implanted metal/Si system
- 1 June 1979
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 50 (6) , 3978-3984
- https://doi.org/10.1063/1.326475
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- Kinetics and mechanism of platinum silicide formation on siliconApplied Physics Letters, 1974