Epitaxial growth and doping of and device development in monocyrstalline β-SiC semiconductor thin films
- 1 December 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 181 (1-2) , 1-15
- https://doi.org/10.1016/0040-6090(89)90468-9
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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