A formula for the calculation of the sputtering yield of polycrystalline materials
- 1 January 1982
- journal article
- Published by Taylor & Francis in Radiation Effects
- Vol. 68 (4) , 107-112
- https://doi.org/10.1080/01422448208226917
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The influence of channelling on the sputtering yield of polycrystalline copperRadiation Effects, 1981
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- THE INFLUENCE OF CHANNELING ON Cu SINGLE-CRYSTAL SPUTTERINGApplied Physics Letters, 1966