Stress-induced alignment of NL8 thermal donors in silicon: Energetics and kinetics
- 1 February 1997
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 81 (3) , 1109-1115
- https://doi.org/10.1063/1.363854
Abstract
Preferential alignment is produced for the NL8 thermal double donors (TDDs) when uniaxial stress is applied during their formation at 450 C. The recovery kinetics reveal that they can reorient readily on the time scale of their lifetime and their individual alignments therefore reflect the strain fields that each introduces into the lattice. Analysis reveals that each of the donor cores produces large compressional strain along its C axis, the magnitude of which decreases monotonically with increase in the TDD species series, suggesting strain relief as the mechanism for nearby oxygen accumulation. The rate and activation energy for the reorientation suggests that the process is limited by the diffusion motion of the nearby interstitial oxygen atoms, with 5 jumps being required for TDD3, the third in the series, and progressively more for the subsequent ones.
This publication has 26 references indexed in Scilit:
- Observation of five additional thermal donor species TD12 to TD16 and of regrowth of thermal donors at initial stages of the new oxygen donor formation in Czochralski-grown siliconPhysical Review B, 1992
- Thermal double donors in siliconApplied Physics A, 1989
- Structure of thermal donors (NL8) in silicon: A study with electron-nuclear double resonancePhysical Review B, 1989
- Site Symmetry and Ground-State Characteristics for the Oxygen Donor in SiliconPhysical Review Letters, 1985
- Infrared spectroscopic study of thermal donors in Czochralski-grown silicon developed at 450°CMaterials Letters, 1983
- Spectroscopic studies of 450° C thermal donors in siliconPhysica B+C, 1983
- Electrical and infrared spectroscopic investigations of oxygen-related donors in siliconPhysica Status Solidi (a), 1979
- EPR spectra of heat-treatment centers in oxygen-rich siliconSolid State Communications, 1978
- Mechanism of the Formation of Donor States in Heat-Treated SiliconPhysical Review B, 1958
- Infrared Spectra of Heat Treatment Centers in SiliconPhysical Review Letters, 1958