Truly three dimensional structures microfabricated by laser chemical processing
- 9 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection moldingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fabrication of assembled micromechanical components via deep X-ray lithographyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Growth Kinetics of Microscopic Silicon Rods Grown on Silicon Substrates by the Pyrolytic Laser-Induced Chemical Vapor Deposition ProcessJapanese Journal of Applied Physics, 1990
- Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)Sensors and Actuators, 1989
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986
- Micromachining of three-dimensional silicon structures using photoelectrochemical etchingElectronics Letters, 1985
- Laser grown single crystals of siliconApplied Physics A, 1983
- Techniques for the preparation of boron fibresJournal of Materials Science, 1979