Damage production in Si by MeV carbon cluster irradiation
- 1 December 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 94 (4) , 388-394
- https://doi.org/10.1016/0168-583x(94)95413-5
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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