The removal of surface silica and its effect on the nitridation of high-purity silicon
- 1 January 1984
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 19 (1) , 189-194
- https://doi.org/10.1007/bf02403125
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- The removal of surface silica and its effect upon silicon nitridation kineticsJournal of Materials Science, 1981
- Reaction-bonded silicon nitride: its formation and propertiesJournal of Materials Science, 1979
- The effects of hydrogen on the nitridation of siliconJournal of Materials Science, 1979
- Effects of Fe and FeSi2 on the Nitriding of Si PowderJournal of the American Ceramic Society, 1978
- Nitridation of High‐Purity SiliconJournal of the American Ceramic Society, 1976